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- Nachgewiesen in: USPTO Patent Grants
- Sprachen: English
- Patent Number: 5,015,862
- Publication Date: May 14, 1991
- Appl. No: 07/467,971
- Application Filed: January 22, 1990
- Assignees: Oregon Graduate Institute of Science & Technology
- Claim: What we claim is
- Claim: 1. A method of modulating a liquid metal ion source comprising
- Claim: generating an ion beam with the liquid metal ion source;
- Claim: generating a light beam with a light source;
- Claim: focussing the light beam;
- Claim: directing the focused light beam at the liquid metal ion source;
- Claim: adjusting the location of the directed light beam relative to the liquid metal ion source; and
- Claim: inducing a modulation in the ion beam by modulating the light beam.
- Claim: 2. The method of claim 1 wherein said directing includes aiming the light beam at the tip of the liquid metal ion source.
- Claim: 3. A method of modulating a liquid metal ion source comprising
- Claim: generating an ion beam with the liquid metal ion source; and
- Claim: modulating the ion beam by modulating the temperature of the liquid metal ion source with a modulated light beam.
- Claim: 4. The method of claim 3 wherein said modulating includes aiming the light beam at the tip of the liquid metal ion source.
- Claim: 5. Apparatus for modulating an ion beam source which is generated by a liquid metal ion source, comprising
- Claim: a light beam source for generating a light beam and projecting said light beam along a light beam path;
- Claim: a modulator for modulating said light beam located in said light beam path; and
- Claim: means for directing the modulated light beam to the liquid metal ion source.
- Claim: 6. The apparatus of claim 5 wherein said modulator includes an acousto-optic modulator.
- Claim: 7. The apparatus of claim 6 wherein said modulator includes a signal generator for controlling the rate of modulation of said modulator.
- Claim: 8. The apparatus of claim 7 which includes a collector, for collecting a current generated by the ion beam, an amplifier, for amplifing the generated ion beam current, and a signal comparator, for comparing the signals from said signal generator and from said collector.
- Claim: 9. Apparatus for modulating an ion beam which is generated by a liquid metal ion source comprising
- Claim: a light beam source for generating a light beam;
- Claim: a modulator for modulating said light beam located in the path of said light beam; and
- Claim: means for directing the modulated light beam to the liquid metal ion source, thereby heating the liquid metal ion source to produce a modulated ion beam.
- Claim: 10. The apparatus of claim 9 wherein said modulator includes an acousto-optic modulator.
- Claim: 11. The apparatus of claim 9 wherein said modulator includes a signal generator for controlling the rate of modulation of said modulator.
- Claim: 12. The apparatus of claim 11 which includes a collector, for collecting a current generated by the ion beam, an amplifier, for amplifing the generated ion beam current, and a signal comparator, for comparing the signals from said signal generator and from said collector.
- Current U.S. Class: 250/423R; 250/423P; 250/423F; 250/306; 250/307; 250/424; 250/425
- Current International Class: H01J 2700
- Patent References Cited: 3294970 December 1966 Jenckel ; 3864572 February 1975 van der Mast et al. ; 4259572 March 1981 Brunnee et al. ; 4296322 October 1981 Wechjung ; 4686414 August 1987 McKenna et al.
- Other References: Menz et al., Das Neue Doppelkapillarviskosimeter und Kritische Dutchsieht mir Neusen Messungen der n Werte Reiner Metall, Nov. 1966, p. 15, table 8. ; Gromer, On the Mechanism of Liquid Electron and Ion Sources Applied Physics 19, 1979. ; Swanson et al., Measurement of the Energy Distribution of a Gallium Liquid Metal Ion Source, Jul. 1980. ; Swanson, Recent Advantages in Liquid Metal Ion Source, Oct. 1980. ; Thompson et al., The Dynamics of Liquid Metal Ion Source Applied Physics 17, 1984. ; Kingham et al., Shape of a Liquid Metal Ion Source, Applied Physics A34, 1984. ; Mair, Theoretical Determination of Current-Voltage Curves for Liquid Metal Ion Source, Applied Physics 17, 1984. ; Bemassayag et al., In Situ High Voltage Term Observation Ojan Electrohydrodynamic (EHD) Ion Source, Ultramicroscopy 16, 1985. ; Kingham and Swanson, Theoretical Investigation of Liquid Metal Ion Sources: Field and Temperature Dependence of Ion Emission, Applied Physics A41, 1986. ; Swanson et al., On the Mechanism of Liquid Metal Ion Sources Applied Physics A41, 1986. ; Bell et al., The Influence of Substrate Geometry on the Emission Properties of a Liquid Metal Ion Source, Applied Physics A41, 1986. ; Bartholomeusz, Thermal Response of a Laser-Irradiated Metal Slab Journal Applied Physics 64, Oct. 15, 1988. ; Swanson et al., The Influence of Electrode Geometry on Liquid Metal Ion Source Performance, Journal of the American Vacuum Society, Jul./Aug. 1988. ; Mair, On the Origin of Fast Current Fluctuations in Liquid Metal Ion Source, Applied Physics 21, 1988. ; Hornsey et al., The Effects of Source Temperature and Characteristics on the Optical Emission from a Gallium Liquid Metal Ion Source IOP Publishing Ltd. 1989.
- Primary Examiner: Berman, Jack I.
- Assistant Examiner: Nguyen, Kiet T.
- Attorney, Agent or Firm: Kolisch, Hartwell, Dickinson, McCormack & Heuser
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