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A continuous and integrated cleaning/preparation process is described to condition a silicon surface for the formation of a high quality ultra thin gate oxide described. The process is conducted with the wafer surface immersed in an aqueous solution the composition of which is varied continuously according to the steps of the process. The process includes the initial removal of contaminants and particulates followed by the removal of a native oxide. Next the silicon surface is dressed in the present of both HF and ozone by removing a thin surface layer. Any interfacial contamination or surface structural defects which lay under the native oxide are thereby removed. Next a high quality chemical oxide is grown by the action of the ozone in the aqueous bath. The chemical oxide is found to be of higher purity and structural quality than native oxide and provides a superior passivation of the active surface prior to gate oxidation. The chemical oxide is incorporated into the final gate oxide and, because of it's high quality, results in improved device performance of the final gate oxide.

Titel:	Method for forming a high quality chemical oxide on a freshly cleaned silicon surface as a native oxide replacement
Autor/in / Beteiligte Person:	Twu, Jih-Churng ; Tsai, Tsung-Chieh ; Kao, Roung-Hui ; Cheng, Chia-Chun
Link:	View record in USPTO Patent Grants (Volltext)
Veröffentlichung:	2005
Medientyp:	Patent
Sonstiges:	Nachgewiesen in: USPTO Patent Grants Sprachen: English Patent Number: 6,878,578 Publication Date: April 12, 2005 Appl. No: 10/134823 Application Filed: April 26, 2002 Assignees: Taiwan Semiconductor Manufacturing Co., Ltd. (TW) Claim: 1. A method for forming a chemical oxide comprising: (a) providing a semiconductor structure; (b) subjecting said semiconductor structure to a first solution for a first time period; (c) purging said first solution with de-ionized water; (d) subjecting said semiconductor structure to a second solution containing a concentration of HCl; (e) adding to said second solution for a second time period; (f) after said second time period, adding ozone to said second solution while diminishing said concentration of HCl to substantially zero and maintaining said HF at a maximum HF concentration, whereby a thickness of silicon is removed from a surface of said semiconductor structure; (g) diminishing said HF concentration to substantially zero while maintaining said ozone at a maximum ozone concentration; (h) maintaining said maximum ozone concentration for a third time period whereby a chemical oxide is formed on said semiconductor structure. Claim: 2. The method of claim 1 wherein subjecting said semiconductor structure to said first and second solutions comprises immersing said structure in a flowing liquid bath of the respective solution. Claim: 3. The method of claim 1 wherein subjecting said semiconductor structure to said first and second solutions comprises spraying said solutions onto said semiconductor structure. Claim: 4. The method of claim 1 wherein said first solution is selected from the group consisting of de-ionized water containing ozone and de-ionized water containing ammonium hydroxide and hydrogen peroxide. Claim: 5. The method of claim 1 wherein said first time period is between about 10 and 500 seconds. Claim: 6. The method of claim 1 wherein said second time period is between about 10 and 500 seconds. Claim: 7. The method of claim 1 wherein said concentration of HCl is between about 0.01 and 30 percent by weight. Claim: 8. The method of claim 1 wherein said thickness of silicon removed is less than about 10 Angstroms. Claim: 9. The method of claim 1 wherein said maximum ozone concentration is between about 0.01 parts per billion and 500 parts per million. Claim: 10. The method of claim 1 wherein said third time period is between about 10 and 500 seconds. Claim: 11. The method of claim 1 wherein the thickness of said chemical oxide is less than about 10 Angstroms. Claim: 12. A method for forming an oxide on a semiconductor structure comprising (a) providing a silicon wafer having an active region; (b) subjecting said active region to a first solution for a first time period; (c) purging said first solution with de-ionized water; (d) subjecting said active region to a second solution containing a concentration of HCl; (e) adding HF to said second solution for a second time period; (f) after said second time period, adding ozone to said second solution while diminishing said concentration of HCl to substantially zero and maintaining said HF at a maximum HF concentration, whereby a thickness of silicon is removed in said active region; (g) diminishing said HF concentration to substantially zero while maintaining said ozone at a maximum ozone concentration; (h) maintaining said maximum ozone concentration for a third time period whereby a chemical oxide is formed on said active region. Claim: 13. The method of claim 12 wherein said steps of subjecting said active region to a first and second solution comprises immersing said active region in a flowing liquid bath of the respective solution. Claim: 14. The method of claim 12 wherein said steps of subjecting said active region to said first and second solutions comprises spraying said solutions onto said active region. Claim: 15. The method of claim 12 wherein said first solution is selected from the group consisting of de-ionized water containing ozone and de-ionized water containing ammonium hydroxide and hydrogen peroxide. Claim: 16. The method of claim 12 wherein said first time period is between about 10 and 500 seconds. Claim: 17. The method of claim 12 wherein said second time period is between about 10 and 500 seconds. Claim: 18. The method of claim 12 wherein said concentration of HCl is between about 0.01 and 30 percent by weight. Claim: 19. The method of claim 13 wherein said thickness of silicon removed is less than about 10 Angstroms. Claim: 20. The method of claim 13 wherein said maximum ozone concentration is between about 0.01 parts per billion and 500 parts per million. Claim: 21. The method of claim 13 wherein said third time period is between about 10 and 500 seconds. Claim: 22. The method of claim 13 wherein the thickness of said chemical oxide is less than about 10 Angstroms. Current U.S. Class: 438/197 Patent References Cited: 5464480 November 1995 Matthews ; 5727578 March 1998 Matthews ; 5911837 June 1999 Matthews ; 6475893 November 2002 Giewont et al. ; 6503333 January 2003 Twu et al. Other References: Wolf, S., “Silicon Processing for the VLSI Era”, vol. 3, Lattice Press, Sunset Beach, CA, (1995), p. 438. cited by other ; Wolf, S. & Tanber, R.N., “Silicon Processing for the VLSI Era,” vol. 1, Lattice Press, Sunset Beach, CA, (1986), p. 516. cited by other ; C.Y. Chang et al., “ULSI Technology,” The McGraw-Hill Companies, Inc., New York, NY, pp. 92-93. cited by other Assistant Examiner: Wilson, Scott R. Primary Examiner: Flynn, Nathan J.

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Method for forming a high quality chemical oxide on a freshly cleaned silicon surface as a native oxide replacement