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- Nachgewiesen in: USPTO Patent Grants
- Sprachen: English
- Patent Number: 7,864,334
- Publication Date: January 04, 2011
- Appl. No: 12/190144
- Application Filed: August 12, 2008
- Assignees: JZW LLC (Sunnyvale, CA, US)
- Claim: 1. A common-path interferometry system for the detection of defects in a sample, the system comprising: an illumination source for generating electromagnetic energy directed toward the sample; an optical imaging system for collecting a portion of the electromagnetic energy from the sample including a scattered component of the electromagnetic energy that is predominantly scattered by the sample, and a specular component of the electromagnetic energy that is predominantly undiffracted by the sample; a variable phase controlling system for adjusting a relative phase of the scattered component and the specular component so as to improve the ability to detect defects in the sample; and a sensing system for sensing at least portions of the scattered component and specular component.
- Claim: 2. A system according to claim 1 wherein the sample is a wafer.
- Claim: 3. A system according to claim 1 wherein the sample is a reticle.
- Claim: 4. A system according to claim 1 wherein the scattered and specular components are reflected from a surface of the sample.
- Claim: 5. A system according to claim 1 wherein the variable phase controlling system is positioned such that the relative phase is adjusted at or near an aperture stop of the optical imaging system.
- Claim: 6. A system according to claim 1 wherein the variable phase controlling system is positioned such that the relative phase is adjusted at or near a conjugate plane of an aperture stop of the optical imaging system.
- Claim: 7. A system according to claim 1 wherein defect detection is facilitated by comparing the sensed portions of scattered and specular components with reference information.
- Claim: 8. A system according to claim 6 wherein the sample includes a die of circuit patterns on a semiconductor wafer, and the reference information includes sensed portions of scattered and specular components of a neighboring die of circuit patterns on the wafer.
- Claim: 9. A system according to claim 6 wherein the sample includes a memory area and sensed portions of scattered and specular components from one memory cell are compared with that of another memory cell.
- Claim: 10. A system according to claim 7 wherein the sample is a reticle and the reference information includes at least a portion of a computer generated defect-free reticle image.
- Claim: 11. A system according to claim 1 wherein the relative phase is primarily adjusted by adjusting a phase of the specular component relative to a phase of the scattered component.
- Claim: 12. A system according to claim 11 wherein the phase of the specular component is adjusted primarily using a moveable wedge shaped member positioned in a path of the specular component.
- Claim: 13. A system according to claim 11 wherein the phase of the specular component is adjusted primarily using a moveable mirror positioned in a path of the specular component.
- Claim: 14. A system according to claim 1 further comprising an attenuation system for adjustably attenuating the specular component.
- Claim: 15. A system according to claim 14 wherein the attenuation system adjustably attenuates the specular component using a member having a step-varied reflective coating.
- Claim: 16. A system according to claim 14 wherein the attenuation system uses polarization optical components to provide continuously-variable attenuation of the specular component.
- Claim: 17. A system according to claim 14 wherein an amplitude of specular component is attenuated to increase image contrast.
- Claim: 18. A system according to claim 14 wherein the attenuation system is primarily non-absorbing.
- Claim: 19. A system according to claim 14 wherein an amplitude of the scattered component is attenuated to increase image contrast.
- Claim: 20. A system according to claim 1 wherein the specular component is used to amplify electromagnetic energy scattered by defects in the sample.
- Claim: 21. A system according to claim 20 wherein the amplification does not substantially degrade a signal to noise ratio for the electromagnetic energy scattered by defects in the sample.
- Claim: 22. A system according to claim 1 further comprising polarization optical components selected and arranged such that polarization of the specular and/or scattered components can be varied.
- Claim: 23. A system according to claim 22 wherein the polarization of specular component can be set to maximize a signal-to-noise ratio of electromagnetic energy scattered by defects in the sample.
- Claim: 24. A system according to claim 1 wherein the electromagnetic energy directed toward the sample is at a substantially low angle of incidence.
- Claim: 25. A system according to claim 1 wherein the electromagnetic energy directed toward the sample is at a substantially high angle of incidence so as to reduce pattern noise from the sample.
- Claim: 26. A system according to claim 25 wherein the electromagnetic energy directed toward the sample is such that a reduced amount of flare occurs.
- Claim: 27. A system according to claim 1 wherein the electromagnetic energy can be directed toward the sample from a plurality of different azimuthal angles of incidence.
- Claim: 28. A system according to claim 27 further comprising a rotating mirror or a rotating prism for providing the different azimuthal angles of incidence.
- Claim: 29. A system according to claim 1 wherein the sensing system senses both amplitude and phase information from the scattered and specular components.
- Claim: 30. A system according to claim 1 wherein the electromagnetic energy generated by the illumination source is substantially coherent and is predominantly of a first wavelength.
- Claim: 31. A system according to claim 30 wherein the illumination source includes a laser.
- Claim: 32. A system according to claim 30 wherein the sample is illuminated coherently by the electromagnetic energy.
- Claim: 33. A system according to claim 30 further comprising: a second illumination source for generating substantially coherent electromagnetic energy of a second wavelength, wherein the sample is illuminated coherently by the electromagnetic energy of the first wavelength and the second wavelength; and a second sensing system for sensing at least portions of a scattered component and specular component of the electromagnetic energy from the sample of the second wavelength.
- Claim: 34. A system according to claim 33 further comprising a wavelength splitter for simultaneous multiple wavelength operation which transmits the first wavelength and reflects the second wavelength, and a compensation plate for each wavelength each of which compensates an optical path length for electromagnetic energy having the corresponding wavelength.
- Claim: 35. A system according to claim 30 further comprising a second illumination source for generating a electromagnetic energy predominantly of a second wavelength directed toward the sample, and a plurality of waveplate sections with at least one waveplate for the two different wavelengths of electromagnetic energy.
- Claim: 36. A system according to claim 35 wherein the waveplate sections are arranged as segments on one or more circular rotatable members.
- Claim: 37. A system according to claim 1 further comprising a Fourier filtering system for selectively blocking light at or near an aperture stop of the optical imaging system.
- Claim: 38. A system according to claim 1 further comprising a Fourier filtering system for selectively blocking light at or near a conjugate plane of an aperture stop of the optical imaging system.
- Claim: 39. A system according to claim 38 wherein light is blocked by the Fourier filtering system in two orthogonal directions corresponding to a type of noise-generating electromagnetic energy scattered from the sample.
- Claim: 40. A system according to claim 1 wherein a portion of the electromagnetic energy directed toward the sample transmits through the sample thereby generating the scattered and specular components.
- Claim: 41. A system according to claim 40 wherein the sample is a reticle.
- Claim: 42. A system according to claim 40 wherein a portion of the electromagnetic energy directed toward the sample is reflected from a surface of the sample thereby generating a second specular component and a second scattered component, and the system further comprising a second sensing system for sensing at least portions of the second scattered and second specular components.
- Claim: 43. A system according to claim 1 wherein the illumination source is an extended illumination source.
- Claim: 44. A system according to claim 1 wherein the relative phase of the scattered component and the specular component is adjusted such that an expected signal from defects on the sample is maximized.
- Claim: 45. A system according to claim 1 wherein the relative phase of the scattered component and the specular component is adjusted such that a signal to noise ratio of an expected signal from defects on the sample is maximized.
- Claim: 46. A system according to claim 1 wherein the relative phase of the specular and scattered components is adjusted such that a determination of both amplitude and phase of a signal from defects on the sample can be made.
- Claim: 47. A system according to claim 1 wherein the system is used for one or more applications selected from the group consisting of: detection of defects in densely-patterned, sparsely-patterned or bare semiconductor wafers, reticles, crystal or glass substrates, nano structures, or biological samples; defect review; high resolution measurement of surface topology; high-contrast imaging; phase-contrast imaging; and overlay error measurement.
- Claim: 48. A system according to claim 1 wherein the optical imaging system has a relatively high numerical aperture thereby providing high spatial resolution to the sensing system.
- Claim: 49. A system according to claim 1 wherein the optical imaging system includes a front-end optical imaging lens group for collecting the scattered component and the specular component from the sample.
- Claim: 50. A system according to claim 1 wherein the scattered component and the specular component interfere with each other at an image plane of the sensing system.
- Claim: 51. A system according to claim 1 wherein the optical imaging system includes an adjustable aperture for the specular component.
- Claim: 52. A system according to claim 1 further comprising an analysis system which is programmed to perform two-dimensional signal processing to detect defects.
- Claim: 53. A method of using common-path interferometry to detect defects in a sample, the method comprising: directing electromagnetic energy toward the sample; collecting with an optical imaging system from the sample a scattered component of the electromagnetic energy that is predominantly scattered by the sample, and a specular component of the electromagnetic energy that is predominantly undiffracted by the sample; adjusting a relative phase of the scattered component and the specular component using a variable phase controlling system so as to improve the ability to detect defects in the sample; and sensing at least portions of the scattered component and specular component after said phase adjustment.
- Claim: 54. A method according to claim 53 wherein the sample is a wafer.
- Claim: 55. A method according to claim 53 wherein the sample is a reticle.
- Claim: 56. A method according to claim 53 wherein the scattered and specular components are reflected from a surface of the sample.
- Claim: 57. A method according to claim 53 wherein said adjusting the relative phase occurs at or near an aperture stop of the optical imaging system.
- Claim: 58. A method according to claim 53 wherein said adjusting the relative phase occurs at or near a conjugate plane of the aperture stop of the optical imaging system.
- Claim: 59. A method according to claim 53 further comprising comparing the sensed portions of scattered and specular components with reference information.
- Claim: 60. A method according to claim 59 wherein the sample includes a die of circuit patterns on a semiconductor wafer, and the reference information includes sensed portions of scattered and specular components of a neighboring die of circuit patterns on the wafer.
- Claim: 61. A method according to claim 59 wherein the sample includes a memory area and sensed portions of scattered and specular components from one memory cell are compared with that of another memory cell.
- Claim: 62. A method according to claim 59 wherein the sample is a reticle and the reference information includes at least a portion of a computer generated defect-free reticle image.
- Claim: 63. A method according to claim 53 wherein the relative phase is primarily adjusted by adjusting a phase of the specular component relative to a phase of the scattered component.
- Claim: 64. A method according to claim 63 wherein the phase of the specular component is adjusted primarily using a moveable wedge shaped member positioned in a path of the specular component.
- Claim: 65. A method according to claim 63 wherein the phase of the specular component is adjusted primarily using a moveable mirror positioned in a path of the specular component.
- Claim: 66. A method according to claim 53 further comprising adjustably attenuating the specular component.
- Claim: 67. A method according to claim 66 wherein the specular component is adjustably attenuated using a member having step-varied reflective coating.
- Claim: 68. A method according to claim 66 wherein the specular component is adjustably attenuated using polarization optical components that allow for continuously-variable attenuation of the specular component.
- Claim: 69. A method according to claim 66 wherein an amplitude of the specular component is attenuated so as to increase image contrast.
- Claim: 70. A method according to claim 53 wherein the specular component is used to amplify electromagnetic energy scattered by defects in the sample.
- Claim: 71. A method according to claim 70 wherein the amplification does not substantially degrade a signal to noise ratio for the electromagnetic energy scattered by defects in the sample.
- Claim: 72. A method according to claim 53 further comprising changing polarization of at least one of the specular and scattered components.
- Claim: 73. A method according to claim 72 wherein a polarization of the specular component is changed so as to maximize a signal-to-noise ratio of electromagnetic energy scattered by defects in the sample.
- Claim: 74. A method according to claim 53 wherein the electromagnetic energy directed toward the sample is at a substantially low angle of incidence.
- Claim: 75. A method according to claim 53 wherein the electromagnetic energy directed toward the sample is at a substantially high angle of incidence so as to reduce pattern noise from the sample.
- Claim: 76. A method according to claim 75 wherein the electromagnetic energy is directed toward the sample so as to reduce an amount of flare.
- Claim: 77. A method according to claim 53 wherein the electromagnetic energy can be directed toward the sample from a plurality of different azimuthal angles of incidence.
- Claim: 78. A method according to claim 77 wherein a rotating mirror or a rotating prism is used to provide different azimuthal angles of incidence.
- Claim: 79. A method according to claim 53 wherein the sensing system senses amplitude and phase information from the scattered and specular components.
- Claim: 80. A method according to claim 53 wherein the electromagnetic energy is substantially coherent and is predominantly of a first wavelength.
- Claim: 81. A method according to claim 80 wherein the electromagnetic energy is generated using a laser.
- Claim: 82. A method according to claim 80 wherein the sample is illuminated coherently by the electromagnetic energy.
- Claim: 83. A method according to claim 80 further comprising: directing electromagnetic energy of predominantly a second wavelength toward the sample, wherein the sample is illuminated coherently by the electromagnetic energy of the first wavelength and the second wavelength; and sensing at least portions of a scattered component and specular component of the electromagnetic energy from the sample of the second wavelength.
- Claim: 84. A method according to claim 83 wherein said directing and sensing electromagnetic energy of predominantly the first wavelength and said directing and sensing the electromagnetic energy of predominantly the second wavelength occur during the same time.
- Claim: 85. A method according to claim 83 wherein said directing and sensing electromagnetic energy of predominantly the first wavelength and said directing and sensing the electromagnetic energy of predominantly the second wavelength occur sequentially.
- Claim: 86. A method according to claim 53 further comprising selectively blocking light at or near an aperture stop of the optical imaging system so as to provide Fourier filtering capability.
- Claim: 87. A method according to claim 86 wherein light is blocked in two orthogonal directions corresponding to a type of noise-generating electromagnetic energy scattered from the sample.
- Claim: 88. A method according to claim 53 further comprising selectively blocking light at or near a conjugate plane of an aperture stop of the optical imaging system so as to provide Fourier filtering capability.
- Claim: 89. A method according to claim 53 wherein a portion of the electromagnetic energy directed toward the sample transmits through the sample thereby generating the scattered and specular components.
- Claim: 90. A method according to claim 89 wherein the sample is a reticle.
- Claim: 91. A method according to claim 89 wherein a portion of the electromagnetic energy directed toward the sample is reflected from a surface of the sample thereby generating a second specular component and a second scattered component, and the method further comprising sensing at least portions of the second scattered and second specular components.
- Claim: 92. A method according to claim 53 wherein the electromagnetic energy is emitted from an extended illumination source.
- Claim: 93. A method according to claim 53 wherein the relative phase of the scattered component and the specular component is adjusted such that an expected signal from defects on the sample is maximized.
- Claim: 94. A method according to claim 53 wherein the relative phase of the scattered component and the specular component is adjusted such that a signal to noise ratios of an expected signal from defects on the sample is maximized.
- Claim: 95. A method according to claim 53 wherein the relative phase between specular and scattered components is adjusted such that the sign of a term representing interference between the scattered and specular components term is the same as that of a term representing a dark field.
- Claim: 96. A method according to claim 53 wherein the relative phase of the specular and scattered components is adjusted such that a determination of both amplitude and phase of a signal from defects on the sample can be made.
- Claim: 97. A method according to claim 53 wherein said sensing and said directing electromagnetic energy are repeated for different adjustments made to the relative phase of the scattered and specular components.
- Claim: 98. A method according to claim 97 further comprising determining a complex amplitude of a defect signal.
- Claim: 99. A method according to claim 97 further comprising attenuating the amplitude of the specular component so as to increase image contrast.
- Claim: 100. A method according to claim 97 further comprising changing a polarization of the specular component such that a complex amplitude of a defect signal can be determined.
- Claim: 101. A method according to claim 97 further comprising comparing the sensed portions of scattered and specular components with reference information; and storing data relating to the comparison.
- Claim: 102. A method according to claim 53 wherein the system is used for one or more applications selected from the group consisting of: detection of defects in densely-patterned, sparsely-patterned or bare semiconductor wafers, reticles, crystal or glass substrates, nano structures, or biological samples; defect review; high resolution measurement of surface topology; high-contrast imaging; phase-contrast imaging; and overlay error measurement.
- Claim: 103. A method according to claim 53 wherein the scattered component and the specular component interfere with each other at an image plane where said sensing takes place.
- Claim: 104. A method according to claim 53 further comprising adjusting an adjustable aperture for the specular component.
- Claim: 105. A common-path interferometry system comprising: an illumination source for generating electromagnetic energy directed toward a sample; an optical imaging system for collecting a portion of the electromagnetic energy from the sample including a scattered component of the electromagnetic energy that is predominantly scattered by the sample, and a specular component of the electromagnetic energy that is predominantly undiffracted by the sample; a variable phase controlling system for adjusting a relative phase of the scattered component and the specular component so as to improve the ability to observe the sample; and a sensing system for sensing at least portions of the scattered component and specular component.
- Claim: 106. A system according to claim 105 wherein the variable phase controlling system is positioned such that the relative phase is adjusted at or near the aperture stop of the optical imaging system.
- Claim: 107. A system according to claim 105 further comprising comparing the sensed portions of scattered and specular components with reference information.
- Claim: 108. A system according to claim 105 wherein the relative phase is primarily adjusted by adjusting a phase of the specular component relative to a phase of the scattered component.
- Claim: 109. A system according to claim 105 further comprising an attenuation system for adjustably attenuating the specular component.
- Claim: 110. A system according to claim 105 wherein the specular component is used to amplify electromagnetic energy scattered by artifacts of interest in the sample.
- Claim: 111. A system according to claim 110 wherein the amplification does not substantially degrade a signal to noise ratio for the electromagnetic energy scattered by the artifacts of interest in the sample.
- Claim: 112. A system according to claim 105 further comprising a Fourier filtering system for selectively blocking light at or near an aperture stop of the optical imaging system.
- Claim: 113. A system according to claim 112 wherein light is blocked by the Fourier filtering system in two orthogonal directions corresponding to a type of noise-generating electromagnetic energy scattered from the sample.
- Claim: 114. A system according to claim 105 wherein the system is used for one or more applications selected from the group consisting of: detection of defects in densely-patterned, sparsely-patterned or bare semiconductor wafers, reticles, crystal or glass substrates, nano structures, or biological samples; defect review; high resolution measurement of surface topology; high-contrast imaging; phase-contrast imaging; and overlay error measurement.
- Claim: 115. A method of using common-path interferometry to observe a sample, the method comprising: directing electromagnetic energy toward the sample; collecting with an optical imaging system from the sample a scattered component of the electromagnetic energy that is predominantly scattered by the sample, and a specular component of the electromagnetic energy that is predominantly undiffracted by the sample; adjusting a relative phase of the scattered component and the specular component using a variable phase controlling system so as to improve observation of the sample; and sensing at least portions of the scattered component and specular component after said phase adjustment.
- Claim: 116. A method according to claim 115 wherein said adjusting the relative phase occurs at or near an aperture stop of the optical imaging system.
- Claim: 117. A method according to claim 115 further comprising comparing the sensed portions of scattered and specular components with reference information.
- Claim: 118. A method according to claim 115 wherein the relative phase is primarily adjusted by adjusting a phase of the specular component relative to a phase of the scattered component.
- Claim: 119. A method according to claim 115 further comprising adjustably attenuating the specular component.
- Claim: 120. A method according to claim 119 wherein the specular component is attenuated so as to increase image contrast.
- Claim: 121. A method according to claim 115 wherein the specular component is used to amplify electromagnetic energy scattered by artifacts of interest in the sample.
- Claim: 122. A method according to claim 121 wherein the amplification does not substantially degrade a signal to noise ratio for the electromagnetic energy scattered by the artifacts in the sample.
- Claim: 123. A method according to claim 115 further comprising changing a polarization of the specular component so as to maximize a signal-to-noise ratio of electromagnetic energy scattered by defects in the sample.
- Claim: 124. A method according to claim 115 wherein the electromagnetic energy is substantially coherent and is predominantly of a first wavelength.
- Claim: 125. A method according to claim 115 wherein the electromagnetic energy is generated using a laser.
- Claim: 126. A method according to claim 125 wherein the sample is illuminated coherently by the electromagnetic energy.
- Claim: 127. A method according to claim 125 wherein the electromagnetic energy is substantially is predominantly of a first wavelength, and the method further comprising: directing electromagnetic energy of predominantly a second wavelength toward the sample, wherein the sample is illuminated coherently by the electromagnetic energy of the first wavelength and the second wavelength; and sensing at least portions of a scattered component and specular component of the electromagnetic energy from the sample of the second wavelength.
- Claim: 128. A method according to claim 115 further comprising selectively blocking light at or near an aperture stop of the optical imaging system so as to provide Fourier filtering capability.
- Claim: 129. A method according to claim 115 wherein the system is used for one or more applications selected from the group consisting of: detection of defects in densely-patterned, sparsely-patterned or bare semiconductor wafers, reticles, crystal or glass substrates, nano structures, or biological samples; defect review; high resolution measurement of surface topology; high-contrast imaging; phase-contrast imaging; and overlay error measurement.
- Current U.S. Class: 356/496
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- Other References: M. Francon, “Optical Interferometry,” Academic Press, New York and London, 1966, p. 289. cited by other ; Philip C. D. Hobbs. “Building Electro-Optical Systems; Making it all work,” John Wiley & Sons, Inc., 2000, pp. 30-32. cited by other ; R. M. A. Azzam and N. M. Bashara, “Ellipsometry and Polarized Light” Elsevier Science B. V., 1999, pp. 72-84. cited by other ; Aug. 5, 2009 International Search Report in connection with counterpart International Application No. PCT/US2009/045999. cited by other ; Aug. 5, 2009 Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration in connection with counterpart International Application No. PCT/US2009/045999. cited by other ; Aug. 5, 2009 Written Opinion of the International Searching Authority in connection with counterpart International Application No. PCT/US2009/045999. cited by other
- Primary Examiner: Connolly, Patrick J
- Attorney, Agent or Firm: Cooper & Dunham, LLP
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