Top Down Meets Bottom Up for Nanoscale CMOS and MEMS
In: Nanomaterials A Guide to Fabrication and Applications 2016; (2016)
Buch
Zugriff:
Titel: |
Top Down Meets Bottom Up for Nanoscale CMOS and MEMS
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Autor/in / Beteiligte Person: | Kushagra, Arindam ; Satti, Sampath ; Rao, V. Ramgopal ; author##Sivashankar, Krishnamoorthy ; author##Krzysztof, Iniewski |
Quelle: | Nanomaterials A Guide to Fabrication and Applications 2016; (2016) |
Veröffentlichung: | 2016 |
Medientyp: | Buch |
ISBN: | 978-1-4665-9125-7 (print) ; 978-1-4665-9126-4 (print) ; 1-4665-9125-0 (print) ; 1-4665-9126-9 (print) |
DOI: | 10.1201/b19168-2 |
Sonstiges: |
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