Advanced Concepts
In: Growth and Transport in Nanostructured Materials : Reactive Transport in PVD, CVD, and ALD; (2017) S. 101-125
Online
E-Book
Zugriff:
Titel: |
Advanced Concepts
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Autor/in / Beteiligte Person: | Yanguas-Gil, Angel |
Quelle: | Growth and Transport in Nanostructured Materials : Reactive Transport in PVD, CVD, and ALD; (2017) S. 101-125 |
Veröffentlichung: | 2017 |
Medientyp: | E-Book |
ISBN: | 978-3-319-24670-3 (print) ; 978-3-319-24672-7 (print) |
DOI: | 10.1007/978-3-319-24672-7_5 |
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