Double Zone Thermal CVD and Plasma Enhanced CVD Systems for Deposition of Films/Coatings with Eminent Conformal Coverage
In: Advances in Manufacturing Technology and Management : Proceedings of 6th International Conference on Advanced Production and Industrial Engineering (ICAPIE)—2021; (2023) S. 273-283
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E-Book
Zugriff:
Titel: |
Double Zone Thermal CVD and Plasma Enhanced CVD Systems for Deposition of Films/Coatings with Eminent Conformal Coverage
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Autor/in / Beteiligte Person: | Shreya ; Yadav, Anukool ; Khatri, Ritika ; Jain, Nikita ; Bhandari, Anurag ; Puri, Nitin K. ; Cavas-Martínez, Francisco, Series Editor ; Chaari, Fakher, Series Editor ; di Mare, Francesca, Series Editor ; Gherardini, Francesco, Series Editor ; Haddar, Mohamed, Series Editor ; Ivanov, Vitalii, Series Editor ; Kwon, Young W., Series Editor ; Trojanowska, Justyna, Series Editor ; Singari, Ranganath M. [Ed.] ; Jain, Prashant Kumar [Ed.] ; Kumar, Harish [Ed.] |
Quelle: | Advances in Manufacturing Technology and Management : Proceedings of 6th International Conference on Advanced Production and Industrial Engineering (ICAPIE)—2021; (2023) S. 273-283 |
Veröffentlichung: | 2023 |
Medientyp: | E-Book |
ISBN: | 978-981-16-9522-3 (print) ; 978-981-16-9523-0 (print) |
DOI: | 10.1007/978-981-16-9523-0_31 |
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