CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor
In: Nature Communications, Jg. 14 (2023-12-01), Heft 1
Online
academicJournal
Zugriff:
Titel: |
CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor
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Autor/in / Beteiligte Person: | Wang, Wenhui ; Li, Ke ; Lan, Jun ; Shen, Mei ; Wang, Zhongrui ; Feng, Xuewei ; Yu, Hongyu ; Chen, Kai ; Li, Jiamin ; Zhou, Feichi ; Lin, Longyang ; Zhang, Panpan ; Li, Yida |
Link: | |
Zeitschrift: | Nature Communications, Jg. 14 (2023-12-01), Heft 1 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 2041-1723 (print) |
DOI: | 10.1038/s41467-023-41868-5 |
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