Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication
In: International Journal of Precision Engineering and Manufacturing-Green Technology, 2024-04-05, S. 1-22
Online
academicJournal
Zugriff:
Titel: |
Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication
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Autor/in / Beteiligte Person: | Baek, Song Yi ; Park, Jingyu ; Koh, Taeyoung ; Kim, Dohyung ; Woo, Jewoung ; Jung, Jinwoo ; Park, Se Jun ; Lee, Changsoo ; Choi, Chulhwan |
Link: | |
Zeitschrift: | International Journal of Precision Engineering and Manufacturing-Green Technology, 2024-04-05, S. 1-22 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 2288-6206 (print) ; 2198-0810 (print) |
DOI: | 10.1007/s40684-024-00606-y |
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