CMOS-MEMS electrostatic micromotor based on FGMOS transduction by electromechanical modification of its coupling coefficient and low operating voltage
In: Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems, Jg. 30 (2024-07-01), Heft 7, S. 809-819
Online
academicJournal
Zugriff:
Titel: |
CMOS-MEMS electrostatic micromotor based on FGMOS transduction by electromechanical modification of its coupling coefficient and low operating voltage
|
---|---|
Autor/in / Beteiligte Person: | Sánchez–Márquez, L. ; Abarca–Jiménez, G. S. ; Reyes–Barranca, M. A. ; Mares-Carreño, J. |
Link: | |
Zeitschrift: | Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems, Jg. 30 (2024-07-01), Heft 7, S. 809-819 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 0946-7076 (print) ; 1432-1858 (print) |
DOI: | 10.1007/s00542-024-05658-3 |
Sonstiges: |
|