Surface chemistry of boron-doped SiO{sub 2} CVD: Enhanced uptake of tetraethyl orthosilicate by hydroxyl groups bonded to boron
1993
Online
Konferenz
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Surface chemistry of boron-doped SiO{sub 2} CVD: Enhanced uptake of tetraethyl orthosilicate by hydroxyl groups bonded to boron
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Autor/in / Beteiligte Person: | Moffat, H |
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Veröffentlichung: | 1993 |
Medientyp: | Konferenz |
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