Heterogeneous reaction mechanisms and kinetics relevant to the CVD of semiconductor materials
In: Other Information: PBD: Mar 1994; (1994-03-01)
Online
report
Titel: |
Heterogeneous reaction mechanisms and kinetics relevant to the CVD of semiconductor materials
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Autor/in / Beteiligte Person: | Coltrin, M |
Link: | |
Quelle: | Other Information: PBD: Mar 1994; (1994-03-01) |
Veröffentlichung: | 1994 |
Medientyp: | report |
ISSN: | 9401-1001 (print) |
DOI: | 10.2172/10146724 |
Sonstiges: |
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