Device level 3D-ICs Through Membrane Projected Lithography Using CMOS Compatible Materials.
2015
Online
Konferenz
Titel: |
Device level 3D-ICs Through Membrane Projected Lithography Using CMOS Compatible Materials.
|
---|---|
Autor/in / Beteiligte Person: | Burckel, David |
Link: | |
Veröffentlichung: | 2015 |
Medientyp: | Konferenz |
Sonstiges: |
|