The nucleation of atomic layer deposited HfO{sub 2} films, and evolution of their microstructure, studied by grazing incidence small angle x-day scattering using synchrotron radiation.
2020
Online
academicJournal
Titel: |
The nucleation of atomic layer deposited HfO{sub 2} films, and evolution of their microstructure, studied by grazing incidence small angle x-day scattering using synchrotron radiation.
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Autor/in / Beteiligte Person: | XFD |
Link: | |
Veröffentlichung: | 2020 |
Medientyp: | academicJournal |
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