A comparison of mechanical properties of three MEMS materials - silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon (Ta-C)
2004
Online
Konferenz
Titel: |
A comparison of mechanical properties of three MEMS materials - silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon (Ta-C)
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Autor/in / Beteiligte Person: | Auciello, Orlando [Argonne National Laboratory, Argonne, IL] |
Link: | |
Veröffentlichung: | 2004 |
Medientyp: | Konferenz |
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